Abstract
This invention provides a gas sensing unit and the producing method thereof. The gas sensing unit comprises a substrate, and a nano-pillar layer thereon. Furthermore, a detective layer is formed on the nano-pillar layer that causes a significant increase of the sensitivity and the recovery ability of the gas sensor, especially for sensing low concentration gas.
| Translated title of the contribution | GAS SENSING UNIT AND PRODUCING METHOD THEREOF |
|---|---|
| Original language | Chinese (Traditional) |
| Patent number | I601956 |
| IPC | G01N 33/497(2006.01) |
| State | Published - 11 10 2017 |
Bibliographical note
公開公告號: I601956Announcement ID: I601956