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氣體感測裝置及其製作方法
Translated title of the contribution
:
GAS SENSING DEVICE AND MANUFACTURING METHOD THEREOF
Chia-Ming Yang
(Inventor)
, Chao-Sung Lai (Inventor)
, YU-CHENG YANG (Inventor)
, TSUNGCHENG CHEN (Inventor)
Graduate Institute of Electro-Optical Engineering
Department of Electronic Engineering
Research output
:
Patent
Overview
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Engineering
Sensing Device
100%
Plasma
100%
Insulating Layer
75%
Silicon Substrate
50%
Sensing Layer
50%