| Translated title of the contribution | Study of the Effect of TiN Diffusion Barrier on the Electrical Properties of BST Capacitor used for High Density DRAM |
|---|---|
| Original language | Chinese (Traditional) |
| Supervisors/Advisors |
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| State | Published - 2002 |
| Externally published | Yes |
氮化鈦擴散阻擋層對應用於高密度DRAM之鈦酸鍶鋇電容器電性影響之探討
黃慶玲
Research output: Types of Thesis › Master's thesis