| Original language | Chinese (Traditional) |
|---|---|
| Pages (from-to) | 136-142 |
| Journal | 材料科學與工程 |
| Volume | 33 |
| Issue number | 3 |
| State | Published - 2001 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
氮化鎵乾式蝕刻技術（ICP-RIE）之研究
- Liann-Be Chang
- , 劉 書史
Research output: Contribution to journal › Journal Article › peer-review