氮化鎵磊晶薄膜的反應性離子蝕刻研究

Translated title of the contribution: Investigation of Reactive-Ion Etching (RIE) Technique for GaN Epitaxial Materials
  • 翁啟文

Research output: Types of Thesis › Master's thesis

Translated title of the contributionInvestigation of Reactive-Ion Etching (RIE) Technique for GaN Epitaxial Materials
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chen, Nai-Chuan, Supervisor
StatePublished - 2007
Externally publishedYes

Access to Document

Cite this