氮離子於複晶矽氧化層特性之研究

Translated title of the contribution: Nitrogen Effects on the characterization of polysilicon oxide

楊紹明

Research output: Types of Thesis › Master's thesis

Translated title of the contributionNitrogen Effects on the characterization of polysilicon oxide
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2001
Externally publishedYes

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