溶凝膠靶材製備條件對RF-磁控濺鍍法鍍製ITO薄膜性質影響之探討

Translated title of the contribution: Effect of Target Preparation Conditions on the Characteristics of RF-Sputtered Indium Tin Thin Films

李秀春

Research output: Types of Thesis › Master's thesis

Translated title of the contributionEffect of Target Preparation Conditions on the Characteristics of RF-Sputtered Indium Tin Thin Films
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2000
Externally publishedYes

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