溶膠-凝膠程序製備條件對BST靶材與濺鍍法製備薄膜微結構及介電特性影響之探討

Translated title of the contribution: Effects of Preparation Conditions of Sol-Gel Process on BST Target, and Structure and Dielectrics of Sputtering Thin Film

彭康泰

Research output: Types of ThesisMaster's thesis

Translated title of the contributionEffects of Preparation Conditions of Sol-Gel Process on BST Target, and Structure and Dielectrics of Sputtering Thin Film
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2002
Externally publishedYes

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