Translated title of the contribution | Effects of Preparation Conditions of Sol-Gel Process on BST Target, and Structure and Dielectrics of Sputtering Thin Film |
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Original language | Chinese (Traditional) |
Supervisors/Advisors |
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State | Published - 2002 |
Externally published | Yes |
溶膠-凝膠程序製備條件對BST靶材與濺鍍法製備薄膜微結構及介電特性影響之探討
彭康泰
Research output: Types of Thesis › Master's thesis