矽晶圓薄膜鍍層波傳行為之分析與量測

Translated title of the contribution: Modeling and Measurement of Acoustic Waves Propagating in Silicon Wafers with Thin Film Coating

杜志煒

Research output: Types of Thesis › Master's thesis

Translated title of the contributionModeling and Measurement of Acoustic Waves Propagating in Silicon Wafers with Thin Film Coating
Original languageChinese (Traditional)
Supervisors/Advisors
  • Yang, Che-Hua, Supervisor
StatePublished - 2002
Externally publishedYes

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