磷化銦鎵生長條件最佳化之研究

Liann-Be Chang, 劉 重慶, 鄭 克勇

Research output: Contribution to journalJournal Article peer-review

Abstract

     InGaP epilayers were grown on (100) GaAs substrate by liquid phase epitaxy (LPE) . Fourdifferent growth temperature 800, 750, 710 and 700℃ were studied. The optimum growth conditions involve a growth temperature of 750℃ and a lattice mismatch (Aa /as) of 0.290, thegrown layers show a mirror-like surface morphology, the strongest photoluminescence (PL)intensity, the narrowest-PL full width at half maximun.(FWHM), ~6 meV at 17 K., andminimum defect related PL subpeak.
Original languageChinese (Traditional)
Pages (from-to)95-106
Journal材料科學
Volume20
Issue number2
StatePublished - 1988

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