磷離子植入鍺晶片的擴散與活化分析

Translated title of the contribution: Analysis of Phosphorus Diffusion and Activation in Germanium

黃思凱

Research output: Types of Thesis › Master's thesis

Translated title of the contributionAnalysis of Phosphorus Diffusion and Activation in Germanium
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2017
Externally publishedYes

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