藉由快速熱退火及氟離子佈植改善DRAM元件可靠度

Translated title of the contribution: DRAM Device Reliability Improvement by Rapid Thermal Anneal and Fluorine Passivation

李偉平

Research output: Types of Thesis › Master's thesis

Translated title of the contributionDRAM Device Reliability Improvement by Rapid Thermal Anneal and Fluorine Passivation
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Jer-Chyi, Supervisor
  • Lai, Chao-Sung, Supervisor
StatePublished - 2012
Externally publishedYes

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