製程條件對以溶凝膠靶配合RF磁控濺鍍製備銦鋅氧化物薄膜性質影響之探討

Translated title of the contribution: Effects of sol-gel derived targets preparation conditions on the properties of RF sputtered indium zinc oxide thin films

朱俊隆

Research output: Types of ThesisMaster's thesis

Translated title of the contributionEffects of sol-gel derived targets preparation conditions on the properties of RF sputtered indium zinc oxide thin films
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2004
Externally publishedYes

Cite this