超臨界乾燥條件對溶凝膠法製備之ITO微粉、靶材及濺鍍薄膜特性影響之探討

Translated title of the contribution: Effect of Supercritical Drying on The Properties of Sol-Gel Derived ITO Powder, Targets and putter-Deposited Thin Films

蘇世明

Research output: Types of ThesisMaster's thesis

Translated title of the contributionEffect of Supercritical Drying on The Properties of Sol-Gel Derived ITO Powder, Targets and putter-Deposited Thin Films
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2005
Externally publishedYes

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