運用故障樹分析於濺鍍機故障診斷之研究-以光碟製程濺鍍機為例

Translated title of the contribution: A Study of Applying Fault Tree Analysis to Fault Diagnosis of Sputtering Machine - Take the Disc Process Sputtering Machine as an Example

李智騏

Research output: Types of Thesis › Master's thesis

Translated title of the contributionA Study of Applying Fault Tree Analysis to Fault Diagnosis of Sputtering Machine - Take the Disc Process Sputtering Machine as an Example
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lin, Shih-Wei, Supervisor
StatePublished - 2018
Externally publishedYes

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