Abstract
Apparatus and method for manufacturing metallic single crystalline are provided. The apparatus for manufacturing metallic single crystalline comprises a substrate, a single crystalline precursor solution, a light emitter, an optical power regulator, and a linear polarizing filter. The linear polarized light beam generated by the light emitter and the linear polarizing filter induces the self-assembly, oriented attachment, and recrystallization of the single crystalline precursor when the single crystalline precursor is exposed to the linear polarized light beam.
| Translated title of the contribution | APPARATUS FOR MANUFACTURING METALLIC SINGLE CRYSTALLINE AND THE OPERATING METHOD THEREOF |
|---|---|
| Original language | Chinese (Traditional) |
| Patent number | I617702 |
| IPC | C23C-026/00(2006.01);H01L-021/268(2006.01) |
| State | Published - 11 03 2018 |
Bibliographical note
公開公告號: I617702Announcement ID: I617702
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