銦錫氧化物導電薄膜RF磁控濺鍍法配合溶膠-凝膠法之製備與鑑定之探討

Translated title of the contribution: Preparation and Characterization of Conductive Indium Tin Oxide Thin Films by RF Sputtering Using Sol-Gel Derived Target

洪家福

Research output: Types of ThesisMaster's thesis

Translated title of the contributionPreparation and Characterization of Conductive Indium Tin Oxide Thin Films by RF Sputtering Using Sol-Gel Derived Target
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 1998
Externally publishedYes

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