鐠釔氧化物生化離子感測器

A biochemical ion sensor of promethium yttrium oxide is provided, which is made by using an ion-sensor field effect transistor as the basis, and uses the material of promethium yttrium oxide (PrYxOy) with high dielectric constant as the sensor film for the ion-sensor field effect transistor. Moreover, the manner of fixing the enzyme membrane to the promethium yttrium oxide sensor film can be further utilized to expand the application level of the biochemical ion sensor of promethium yttrium oxide to the enzyme sensor portion. The disclosed is small in volume and simple as well as easy in the process procedures, thereby capable of decreasing the hysteresis and having high sensing characteristics.