離子感測裝置及其製作方法

An ion sensitive apparatus is disclosed in the present invention and at least comprises a substrate, a first electrode, a second electrode, a sensing film and a packaging material. The first electrode comprises a first body and a plurality of first fingers electronically connected with the first body. The second electrode comprises a second body and a plurality of second fingers electronically connected with the second body. Preferably, the first fingers and the second fingers are parallel and intersected with each other to overlap and form a sensing zone. The sensing film is disposed to cover the sensing zone and the packaging material is disposed on the surrounding of the sensing zone for packaging the sensing zone.