電漿浸入式離子佈值的前處理應用在矽晶圓上介電層的研究

Translated title of the contribution: The dielectric research of Plasma Immersion Ion Implantation (PIII) pretreatment apply on silicon wafer

羅振宇

Research output: Types of Thesis › Master's thesis

Translated title of the contributionThe dielectric research of Plasma Immersion Ion Implantation (PIII) pretreatment apply on silicon wafer
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2007
Externally publishedYes

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