Abstract
The invention provides a plasma processing device, wherein the upper electrode and the lower electrode are in the vacuum chamber. The chip is placed in the lower electrode. The first plate is placed between the upper electrode and the lower electrode, and the first plate includes the plurality of first voids. The second plate is between the first plate and the lower electrode, and the second plate includes a plurality of second voids. The high frequency power is provided by the upper electrode and the lower electrode in the vacuum chamber, and the plasma is generated between the third and the upper electrode. The plasma is filtered by the third void, the first void, and the second void.
| Translated title of the contribution | THE PLASMA PROCESSING DEVICE |
|---|---|
| Original language | Chinese (Traditional) |
| IPC | H01J 37/32(2006.01) |
| State | Published - 01 03 2014 |
Bibliographical note
公開公告號: 2.01409526E8Announcement ID: 2.01409526E8