電阻式記憶體感測元件

Translated title of the contribution: RESISTIVE RANDOM-ACCESS MEMORY SENSOR ELEMENT

Jer-Chyi Wang (Inventor), Chao-Sung Lai (Inventor), YU-REN YE (Inventor)

Research output: Patent

Abstract

The Resistive random-access memory sensor element is provided, which includes a first electrode, an insulation layer has a first recess disposed in the first electrode, a resistance conversion layer is disposed on a surface of the insulation layer and on an inner surface of the first recess so as to form a second recess, a second electrode disposed on the insulation layer and disposed within the second recess, a sensing film disposed on the second electrode and a third recess is formed therein to expose the portion surface of the second electrode, and a photoresist layer disposed on the sensing film and a fourth recess is formed therein to expose the portion surface of the sensing film, and a fifth recess is formed to align the second recess and a portion of surface of the second electrode is to be exposed.
Translated title of the contributionRESISTIVE RANDOM-ACCESS MEMORY SENSOR ELEMENT
Original languageChinese (Traditional)
IPCH01L 45/00(2006.01); G11C 13/00(2006.01); H01L 21/8239(2006.01)
StatePublished - 16 10 2014

Bibliographical note

公開公告號: 2.01440273E8
Announcement ID: 2.01440273E8

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