Abstract
The Resistive random-access memory sensor element is provided, which includes a first electrode, an insulation layer has a first recess disposed in the first electrode, a resistance conversion layer is disposed on a surface of the insulation layer and on an inner surface of the first recess so as to form a second recess, a second electrode disposed on the insulation layer and disposed within the second recess, a sensing film disposed on the second electrode and a third recess is formed therein to expose the portion surface of the second electrode, and a photoresist layer disposed on the sensing film and a fourth recess is formed therein to expose the portion surface of the sensing film, and a fifth recess is formed to align the second recess and a portion of surface of the second electrode is to be exposed.
Translated title of the contribution | RESISTIVE RANDOM-ACCESS MEMORY SENSOR ELEMENT |
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Original language | Chinese (Traditional) |
IPC | H01L 45/00(2006.01); G11C 13/00(2006.01); H01L 21/8239(2006.01) |
State | Published - 16 10 2014 |
Bibliographical note
公開公告號: 2.01440273E8Announcement ID: 2.01440273E8