非晶化矽基板中碳導致摻雜去活化之研究

Translated title of the contribution: Deactivation of Dopants by Carbon in Preamorphized Silicon

廖學駿

Research output: Types of Thesis › Doctoral thesis

Translated title of the contributionDeactivation of Dopants by Carbon in Preamorphized Silicon
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2020
Externally publishedYes

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