高介電常數的三氧化二鐠閘極介電層在薄膜電晶體應用

Research output: Contribution to journal › Journal Article › peer-review

Cite this

@article{511b785b2d0d4b279aac449dea83dfe9,

title = "高介電常數的三氧化二鐠閘極介電層在薄膜電晶體應用",

keywords = "一氧化二氮, 三氧化二鐠, 多晶矽薄膜場效電晶體, 高介電常數材料",

author = "Tung-Ming Pan and 廷圍吳 and 立丞嚴",

year = "2010",

language = "繁體中文",

volume = "16",

pages = "133--144",

journal = "電子月刊",

issn = "1814-912X",

number = "4",

}