高功率脈衝磁控濺射系統沉積之鈦摻雜二氧化鋯薄膜的反鐵電特性探討

Translated title of the contribution: Anti-ferroelectricity of titanium doped zirconium dioxide thin films deposited by HIPIMS system

王柏濬

Research output: Types of Thesis › Master's thesis

Translated title of the contributionAnti-ferroelectricity of titanium doped zirconium dioxide thin films deposited by HIPIMS system
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2020
Externally publishedYes

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