Abstract
The electromigration (EM) phenomenon often exhibits two failure mechanisms. The early failures are due to voids developed in the via or at the via-line interface while the wear-out failures are predominantly attributed to voids developed within the interconnect line itself. Presence of these two failure mechanisms necessitates the use of a bimodal mixture distribution for analyzing EM data. Also, due to the presence of incubation time in EM, the three-parameter lognormal distribution should be applied to account for the initial failure-free duration. An efficient global optimization technique called "simulated annealing" is introduced in this work to globally optimize the log-likelihood function of the mixture distribution and determine the values of the lognormal parameters that accurately fit the experimental EM failure data.
| Original language | English |
|---|---|
| Pages (from-to) | 8804-8809 |
| Number of pages | 6 |
| Journal | Thin Solid Films |
| Volume | 516 |
| Issue number | 23 |
| DOIs | |
| State | Published - 01 10 2008 |
| Externally published | Yes |
Keywords
- Electromigration
- Incubation time
- Lognormal model
- Mixture distribution
- Simulated annealing
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