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A bimodal three-parameter lognormal mixture distribution for electromigration failure analysis

  • Cher Ming Tan*
  • , Nagarajan Raghavan
  • *Corresponding author for this work
  • Nanyang Technological University

Research output: Contribution to journal › Journal Article › peer-review

2 Scopus citations

Abstract

The electromigration (EM) phenomenon often exhibits two failure mechanisms. The early failures are due to voids developed in the via or at the via-line interface while the wear-out failures are predominantly attributed to voids developed within the interconnect line itself. Presence of these two failure mechanisms necessitates the use of a bimodal mixture distribution for analyzing EM data. Also, due to the presence of incubation time in EM, the three-parameter lognormal distribution should be applied to account for the initial failure-free duration. An efficient global optimization technique called "simulated annealing" is introduced in this work to globally optimize the log-likelihood function of the mixture distribution and determine the values of the lognormal parameters that accurately fit the experimental EM failure data.

Original languageEnglish
Pages (from-to)8804-8809
Number of pages6
JournalThin Solid Films
Volume516
Issue number23
DOIs
StatePublished - 01 10 2008
Externally publishedYes

Keywords

  • Electromigration
  • Incubation time
  • Lognormal model
  • Mixture distribution
  • Simulated annealing

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