Abstract
This paper describes a laser optical technique that allows the detection of in-plane motion of Lamb waves. This interference-based laser optical technique includes a tiny square indentation with a width of about 30 μ, on the sample surface and a relatively simple optical arrangement. The current technique is applied for the detection of in-plane motions of Lamb waves propagating in a 70-μ thick brass plate. Measurement of So mode dominated by in-plane motion in the low f d (frequency times thickness) regime is successfully demonstrated with the current technique. With the indentation replaced by a microreflector in a microelectromechanical (MEMS) structure, this technique is applicable for the detection of in-plane motion in MEMS structures.
| Original language | English |
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| Pages (from-to) | 1372-1377 |
| Number of pages | 6 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 52 |
| Issue number | 8 |
| DOIs | |
| State | Published - 08 2005 |