Abstract
In this paper, we present a general procedure for evaluating the process yield with multiple characteristics in semiconductor manufacturing processes. The proposed process yield indices can be applied for multivariate normal distribution data or multivariate non-normal distribution data. These indices provide an exact measure of the overall process yield. Also, we show how to calculate the approximate lower confidence bound for the true process yield by using the one-to-one correspondence between the proposed process yield index and the overall process yield. Three examples are used to demonstrate the performance of the proposed approach. The results show that our procedure for evaluating the process yield with multiple characteristics is an effective approach.
| Original language | English |
|---|---|
| Article number | 4 |
| Pages (from-to) | 503-508 |
| Number of pages | 6 |
| Journal | IEEE Transactions on Semiconductor Manufacturing |
| Volume | 23 |
| Issue number | 4 |
| DOIs | |
| State | Published - 11 2010 |
| Externally published | Yes |
Keywords
- Lower confidence bound
- multiple characteristics
- process yield