A hybrid push/pull-dispatching rule for a photobay in a 300 mm wafer fab

J. T. Lin; F. K. Wang; Y. M. Chang

doi:10.1016/j.rcim.2005.02.003

A hybrid push/pull-dispatching rule for a photobay in a 300 mm wafer fab

J. T. Lin, F. K. Wang^*, Y. M. Chang

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

36 Scopus citations

Abstract

In this paper, the simulation analysis of an automated material handling system (AMHS) for a photobay in a 300 mm wafer fab was analyzed, considering the effects of the dispatching rules. Discrete-event simulation models were developed in an e-M Plant to study this system. Currently, the combination of the shortest distance with the nearest vehicle (SD_NV) and the first-encounter first-served (FEFS) dispatching rule was used in this system. In order to improve the system performance, a hybrid push/pull (PP) dispatching rule was proposed. The simulation results reveal a substantial improvement of the AMHS performance and reduced the WIP and cycle time as a consequence of implementing a PP dispatching rule.

Original language	English
Pages (from-to)	47-55
Number of pages	9
Journal	Robotics and Computer-Integrated Manufacturing
Volume	22
Issue number	1
DOIs	https://doi.org/10.1016/j.rcim.2005.02.003
State	Published - 02 2006
Externally published	Yes

Keywords

Hybrid push/pull
Photobay
Simulation

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10.1016/j.rcim.2005.02.003

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abstract = "In this paper, the simulation analysis of an automated material handling system (AMHS) for a photobay in a 300 mm wafer fab was analyzed, considering the effects of the dispatching rules. Discrete-event simulation models were developed in an e-M Plant to study this system. Currently, the combination of the shortest distance with the nearest vehicle (SD_NV) and the first-encounter first-served (FEFS) dispatching rule was used in this system. In order to improve the system performance, a hybrid push/pull (PP) dispatching rule was proposed. The simulation results reveal a substantial improvement of the AMHS performance and reduced the WIP and cycle time as a consequence of implementing a PP dispatching rule.",

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year = "2006",

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AU - Wang, F. K.

AU - Chang, Y. M.

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N2 - In this paper, the simulation analysis of an automated material handling system (AMHS) for a photobay in a 300 mm wafer fab was analyzed, considering the effects of the dispatching rules. Discrete-event simulation models were developed in an e-M Plant to study this system. Currently, the combination of the shortest distance with the nearest vehicle (SD_NV) and the first-encounter first-served (FEFS) dispatching rule was used in this system. In order to improve the system performance, a hybrid push/pull (PP) dispatching rule was proposed. The simulation results reveal a substantial improvement of the AMHS performance and reduced the WIP and cycle time as a consequence of implementing a PP dispatching rule.

AB - In this paper, the simulation analysis of an automated material handling system (AMHS) for a photobay in a 300 mm wafer fab was analyzed, considering the effects of the dispatching rules. Discrete-event simulation models were developed in an e-M Plant to study this system. Currently, the combination of the shortest distance with the nearest vehicle (SD_NV) and the first-encounter first-served (FEFS) dispatching rule was used in this system. In order to improve the system performance, a hybrid push/pull (PP) dispatching rule was proposed. The simulation results reveal a substantial improvement of the AMHS performance and reduced the WIP and cycle time as a consequence of implementing a PP dispatching rule.

KW - Hybrid push/pull

KW - Photobay

KW - Simulation

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JO - Robotics and Computer-Integrated Manufacturing

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IS - 1

ER -

A hybrid push/pull-dispatching rule for a photobay in a 300 mm wafer fab

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Keywords

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