Abstract
In this paper, the simulation analysis of an automated material handling system (AMHS) for a photobay in a 300 mm wafer fab was analyzed, considering the effects of the dispatching rules. Discrete-event simulation models were developed in an e-M Plant to study this system. Currently, the combination of the shortest distance with the nearest vehicle (SD_NV) and the first-encounter first-served (FEFS) dispatching rule was used in this system. In order to improve the system performance, a hybrid push/pull (PP) dispatching rule was proposed. The simulation results reveal a substantial improvement of the AMHS performance and reduced the WIP and cycle time as a consequence of implementing a PP dispatching rule.
| Original language | English |
|---|---|
| Pages (from-to) | 47-55 |
| Number of pages | 9 |
| Journal | Robotics and Computer-Integrated Manufacturing |
| Volume | 22 |
| Issue number | 1 |
| DOIs | |
| State | Published - 02 2006 |
| Externally published | Yes |
Keywords
- Hybrid push/pull
- Photobay
- Simulation
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