A IGZO-based light-addressable potentiometric sensor on a PET susbtrate

Chun Hui Chen; Chia Ming Yang

doi:10.1109/FLEPS.2019.8792303

A IGZO-based light-addressable potentiometric sensor on a PET susbtrate

Chun Hui Chen
, Chia Ming Yang^*

^*Corresponding author for this work

Graduate Institute of Electro-Optical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

A new device on a polyethylene terephthalate (PET) substrate is proposed for light-addressable potentiometric sensor (LAPS). A Indium Gallium Zinc Oxide (IGZO) film is sputtered on the Indium Tin oxide (ITO)/PET substrate as the photosensitive semiconductor layer. A high-dielectric constant layer of NbOx is sputtered on IGZO as the sensing membrane. Photocurrent versus bias voltage curve is illustrated successfully with the ultra-violet (UV) LED illmination with ac signal modulaiton. pH sensitivity, linearity, drift and hysteresis is 68 mV/pH, 99%, 1.8 mV/h and 1.1 mV of this fabricatd device, respectively. The highest operation frequency is 30 kHz, which make it as a highly potential candidate for 2D chemical image sensor, especially first demostrated in a PET susbtrate.

Original language	English
Title of host publication	FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538693049
DOIs	https://doi.org/10.1109/FLEPS.2019.8792303
State	Published - 07 2019
Event	1st IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019 - Glasgow, United Kingdom Duration: 07 07 2019 → 10 07 2019

Publication series

Name	FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings

Conference

Conference	1st IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019
Country/Territory	United Kingdom
City	Glasgow
Period	07/07/19 → 10/07/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

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10.1109/FLEPS.2019.8792303

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Chen, C. H., & Yang, C. M. (2019). A IGZO-based light-addressable potentiometric sensor on a PET susbtrate. In FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings Article 8792303 (FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/FLEPS.2019.8792303

Chen, Chun Hui ; Yang, Chia Ming. / A IGZO-based light-addressable potentiometric sensor on a PET susbtrate. FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings).

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title = "A IGZO-based light-addressable potentiometric sensor on a PET susbtrate",

abstract = "A new device on a polyethylene terephthalate (PET) substrate is proposed for light-addressable potentiometric sensor (LAPS). A Indium Gallium Zinc Oxide (IGZO) film is sputtered on the Indium Tin oxide (ITO)/PET substrate as the photosensitive semiconductor layer. A high-dielectric constant layer of NbOx is sputtered on IGZO as the sensing membrane. Photocurrent versus bias voltage curve is illustrated successfully with the ultra-violet (UV) LED illmination with ac signal modulaiton. pH sensitivity, linearity, drift and hysteresis is 68 mV/pH, 99\%, 1.8 mV/h and 1.1 mV of this fabricatd device, respectively. The highest operation frequency is 30 kHz, which make it as a highly potential candidate for 2D chemical image sensor, especially first demostrated in a PET susbtrate.",

author = "Chen, \{Chun Hui\} and Yang, \{Chia Ming\}",

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series = "FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings",

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Chen, CH & Yang, CM 2019, A IGZO-based light-addressable potentiometric sensor on a PET susbtrate. in FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings., 8792303, FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings, Institute of Electrical and Electronics Engineers Inc., 1st IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019, Glasgow, United Kingdom, 07/07/19. https://doi.org/10.1109/FLEPS.2019.8792303

A IGZO-based light-addressable potentiometric sensor on a PET susbtrate. / Chen, Chun Hui; Yang, Chia Ming.
FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8792303 (FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Chen CH, Yang CM. A IGZO-based light-addressable potentiometric sensor on a PET susbtrate. In FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8792303. (FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings). doi: 10.1109/FLEPS.2019.8792303

A IGZO-based light-addressable potentiometric sensor on a PET susbtrate

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