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A micromachined high-Q X-B and resonator

  • John Papapolymerou*
  • , Jui Ching Cheng
  • , Jack East
  • , Linda P.B. Katehi
  • *Corresponding author for this work
  • University of Michigan, Ann Arbor
  • IEEE

Research output: Contribution to journal › Journal Article › peer-review

131 Citations (SciVal)

Abstract

This letter presents a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.

Original languageEnglish
Pages (from-to)168-170
Number of pages3
JournalIEEE Microwave and Guided Wave Letters
Volume7
Issue number6
DOIs
StatePublished - 06 1997
Externally publishedYes

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