A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technology

Jin Fa Chang*, Yo Sheng Lin, Chi Chen Chen, Chang Zhi Chen, Tao Wang, Shey Shi Lu

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

1 Scopus citations

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Physics