A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technology
- Jin Fa Chang*
- , Yo Sheng Lin
- , Chi Chen Chen
- , Chang Zhi Chen
- , Tao Wang
- , Shey Shi Lu
*Corresponding author for this work
- National Chi Nan University
- National Taiwan University
Research output: Contribution to journal › Journal Article › peer-review
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