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A new insight into the degradation mechanisms of various mobility-enhanced CMOS devices with different substrate engineering
Steve S. Chung*, Y. R. Liu, S. J. Wu, C. S. Lai, Y. C. Liu, D. F. Chen, H. S. Lin, W. T. Shiau, C. T. Tsai, S. C. Chien, S. W. Sun
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
4
Scopus
citations