A novel light-addressable potentiometric sensors set-up with LCD projector as scanning light source

Yen Heng Lin*, Anirban Das, Kai Siang Ho, Chao Sung Lai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

In a typical set-up of light-addressable potentiometric sensor (LAPS), the individual sensing parts of the photosensitive semiconductor chip are addressed by modulated light beam such as laser beam. Although the laser can be executed with precision, the relative equipment is complex and expensive. In this work, a novel approach of utilizing Liquid Crystal Display (LCD) projector as a programmable modulated light source for LAPS set-up has been demonstrated. This setup can deliver an easy, flexible, and miniaturized light source that can address a large number of programmable measurement spots on LAPS structure. Besides, it reveals to be a very promising technique for LAPS image sensor. At present, the smallest spot size of 180 μm can be used to capture measurable signals with normal Si wafer of thickness about 550 μm. By thinning the wafer, the spot size as small as 54 μm is achieved and functions as a modulated light source in this set-up.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages972-975
Number of pages4
DOIs
StatePublished - 2011
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 20 02 201123 02 2011

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/TerritoryTaiwan
CityKaohsiung
Period20/02/1123/02/11

Keywords

  • Liquid crystal display (CD)
  • light-addressable potentiometric sensor (LAPS)
  • pH sensor

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