TY - GEN
T1 - A novel light-addressable potentiometric sensors set-up with LCD projector as scanning light source
AU - Lin, Yen Heng
AU - Das, Anirban
AU - Ho, Kai Siang
AU - Lai, Chao Sung
PY - 2011
Y1 - 2011
N2 - In a typical set-up of light-addressable potentiometric sensor (LAPS), the individual sensing parts of the photosensitive semiconductor chip are addressed by modulated light beam such as laser beam. Although the laser can be executed with precision, the relative equipment is complex and expensive. In this work, a novel approach of utilizing Liquid Crystal Display (LCD) projector as a programmable modulated light source for LAPS set-up has been demonstrated. This setup can deliver an easy, flexible, and miniaturized light source that can address a large number of programmable measurement spots on LAPS structure. Besides, it reveals to be a very promising technique for LAPS image sensor. At present, the smallest spot size of 180 μm can be used to capture measurable signals with normal Si wafer of thickness about 550 μm. By thinning the wafer, the spot size as small as 54 μm is achieved and functions as a modulated light source in this set-up.
AB - In a typical set-up of light-addressable potentiometric sensor (LAPS), the individual sensing parts of the photosensitive semiconductor chip are addressed by modulated light beam such as laser beam. Although the laser can be executed with precision, the relative equipment is complex and expensive. In this work, a novel approach of utilizing Liquid Crystal Display (LCD) projector as a programmable modulated light source for LAPS set-up has been demonstrated. This setup can deliver an easy, flexible, and miniaturized light source that can address a large number of programmable measurement spots on LAPS structure. Besides, it reveals to be a very promising technique for LAPS image sensor. At present, the smallest spot size of 180 μm can be used to capture measurable signals with normal Si wafer of thickness about 550 μm. By thinning the wafer, the spot size as small as 54 μm is achieved and functions as a modulated light source in this set-up.
KW - Liquid crystal display (CD)
KW - light-addressable potentiometric sensor (LAPS)
KW - pH sensor
UR - http://www.scopus.com/inward/record.url?scp=80053302940&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2011.6017517
DO - 10.1109/NEMS.2011.6017517
M3 - 会议稿件
AN - SCOPUS:80053302940
SN - 9781612847757
T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 972
EP - 975
BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Y2 - 20 February 2011 through 23 February 2011
ER -