A Precision Alignment with Moire Technique and Differential Amplifier

Tze chung Chang; Cheng wen Wu; Chien Chou

doi:10.1143/JJAP.31.1940

A Precision Alignment with Moire Technique and Differential Amplifier

Tze chung Chang^*, Cheng wen Wu, Chien Chou

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

Abstract

A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.

Original language	English
Pages (from-to)	1940-1941
Number of pages	2
Journal	Japanese Journal of Applied Physics
Volume	31
Issue number	6 R
DOIs	https://doi.org/10.1143/JJAP.31.1940
State	Published - 06 1992
Externally published	Yes

Keywords

Moire fringes
Ronchi ruling

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10.1143/JJAP.31.1940

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@article{5598b4cedbda49779c677979a0358ec7,

title = "A Precision Alignment with Moire Technique and Differential Amplifier",

abstract = "A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.",

keywords = "Moire fringes, Ronchi ruling",

author = "Chang, {Tze chung} and Wu, {Cheng wen} and Chien Chou",

year = "1992",

month = jun,

doi = "10.1143/JJAP.31.1940",

language = "英语",

volume = "31",

pages = "1940--1941",

journal = "Japanese Journal of Applied Physics",

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publisher = "Japan Society of Applied Physics",

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T1 - A Precision Alignment with Moire Technique and Differential Amplifier

AU - Chang, Tze chung

AU - Wu, Cheng wen

AU - Chou, Chien

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Y1 - 1992/6

N2 - A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.

AB - A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.

KW - Moire fringes

KW - Ronchi ruling

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U2 - 10.1143/JJAP.31.1940

DO - 10.1143/JJAP.31.1940

M3 - 文章

AN - SCOPUS:0026883150

SN - 0021-4922

VL - 31

SP - 1940

EP - 1941

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 6 R

ER -

A Precision Alignment with Moire Technique and Differential Amplifier

Abstract

Keywords

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