A SAW filter using SiO2/LiNbO3 layered-structure phononic crystals

Jia Hong Sun; Yuan Hai Yu

doi:10.1109/FCS.2016.7546802

A SAW filter using SiO₂/LiNbO₃ layered-structure phononic crystals

Jia Hong Sun, Yuan Hai Yu

Department of Mechanical Engineering

Chang Gung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

Phononic crystal (PnC) in half-space allows anisotropic propagation and band gaps for surface acoustic wave (SAW) and promise applications such as filters and reflectors. For the feasible MEMS fabrication, a PnC comprised of cylindrical holes in a SiO₂ layer covering a 128°rotated Y-cut LiNbO₃ substrate was applied and the acoustic modes were analyzed numerically. The band gap for SAW was indicated and the PnC was used as reflective gratings to construct SAW resonators. By tuning the cavity length, the resonant frequency was controlled. Then a ladder-type bandpass filter at 933-947 MHz was defined by two phononic SAW resonators. The result showed feasibility of applying PnC in acoustic electronics devices.

Original language	English
Title of host publication	2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509020911
DOIs	https://doi.org/10.1109/FCS.2016.7546802
State	Published - 16 08 2016
Event	70th IEEE International Frequency Control Symposium, IFCS 2016 - New Orleans, United States Duration: 09 05 2016 → 12 05 2016

Publication series

Name	2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings

Conference

Conference	70th IEEE International Frequency Control Symposium, IFCS 2016
Country/Territory	United States
City	New Orleans
Period	09/05/16 → 12/05/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

Keywords

SAW resonator
bandpass filter
layered SAW device
phononic crystal

Access to Document

10.1109/FCS.2016.7546802

Cite this

Sun, J. H., & Yu, Y. H. (2016). A SAW filter using SiO₂/LiNbO₃ layered-structure phononic crystals. In 2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings Article 7546802 (2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/FCS.2016.7546802

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abstract = "Phononic crystal (PnC) in half-space allows anisotropic propagation and band gaps for surface acoustic wave (SAW) and promise applications such as filters and reflectors. For the feasible MEMS fabrication, a PnC comprised of cylindrical holes in a SiO2 layer covering a 128°rotated Y-cut LiNbO3 substrate was applied and the acoustic modes were analyzed numerically. The band gap for SAW was indicated and the PnC was used as reflective gratings to construct SAW resonators. By tuning the cavity length, the resonant frequency was controlled. Then a ladder-type bandpass filter at 933-947 MHz was defined by two phononic SAW resonators. The result showed feasibility of applying PnC in acoustic electronics devices.",

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author = "Sun, {Jia Hong} and Yu, {Yuan Hai}",

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Sun, JH & Yu, YH 2016, A SAW filter using SiO₂/LiNbO₃ layered-structure phononic crystals. in 2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings., 7546802, 2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 70th IEEE International Frequency Control Symposium, IFCS 2016, New Orleans, United States, 09/05/16. https://doi.org/10.1109/FCS.2016.7546802

A SAW filter using SiO₂/LiNbO₃ layered-structure phononic crystals. / Sun, Jia Hong; Yu, Yuan Hai.
2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. 7546802 (2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - Phononic crystal (PnC) in half-space allows anisotropic propagation and band gaps for surface acoustic wave (SAW) and promise applications such as filters and reflectors. For the feasible MEMS fabrication, a PnC comprised of cylindrical holes in a SiO2 layer covering a 128°rotated Y-cut LiNbO3 substrate was applied and the acoustic modes were analyzed numerically. The band gap for SAW was indicated and the PnC was used as reflective gratings to construct SAW resonators. By tuning the cavity length, the resonant frequency was controlled. Then a ladder-type bandpass filter at 933-947 MHz was defined by two phononic SAW resonators. The result showed feasibility of applying PnC in acoustic electronics devices.

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