A two-port ZnO/silicon Lamb wave resonator using phononic crystals

Chao Yi Huang; Jia Hong Sun; Tsung Tsong Wu

doi:10.1063/1.3467145

A two-port ZnO/silicon Lamb wave resonator using phononic crystals

Chao Yi Huang, Jia Hong Sun, Tsung Tsong Wu^*

^*Corresponding author for this work

National Taiwan University

Research output: Contribution to journal › Journal Article › peer-review

64 Scopus citations

Abstract

We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

Original language	English
Article number	031913
Journal	Applied Physics Letters
Volume	97
Issue number	3
DOIs	https://doi.org/10.1063/1.3467145
State	Published - 19 07 2010
Externally published	Yes

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@article{8895796bf8fe4017ba9a107765ec2db4,

title = "A two-port ZnO/silicon Lamb wave resonator using phononic crystals",

abstract = "We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.",

author = "Huang, {Chao Yi} and Sun, {Jia Hong} and Wu, {Tsung Tsong}",

year = "2010",

month = jul,

day = "19",

doi = "10.1063/1.3467145",

language = "英语",

volume = "97",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - A two-port ZnO/silicon Lamb wave resonator using phononic crystals

AU - Huang, Chao Yi

AU - Sun, Jia Hong

AU - Wu, Tsung Tsong

PY - 2010/7/19

Y1 - 2010/7/19

N2 - We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

AB - We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

UR - http://www.scopus.com/inward/record.url?scp=77956199908&partnerID=8YFLogxK

U2 - 10.1063/1.3467145

DO - 10.1063/1.3467145

M3 - 文章

AN - SCOPUS:77956199908

SN - 0003-6951

VL - 97

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

M1 - 031913

ER -

A two-port ZnO/silicon Lamb wave resonator using phononic crystals

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