Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen; Li Chung Huang; Wei Shan Wang; Yu Ching Lin; Tsung Tsong Wu; Jia Hong Sun; Masayoshi Esashi

doi:10.1063/1.4802781

Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen^*, Li Chung Huang, Wei Shan Wang, Yu Ching Lin, Tsung Tsong Wu, Jia Hong Sun, Masayoshi Esashi

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Contribution to journal › Journal Article › peer-review

12 Scopus citations

Abstract

Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

Original language	English
Article number	153514
Journal	Applied Physics Letters
Volume	102
Issue number	15
DOIs	https://doi.org/10.1063/1.4802781
State	Published - 15 04 2013

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title = "Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals",

abstract = "Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.",

author = "Chen, {Yung Yu} and Huang, {Li Chung} and Wang, {Wei Shan} and Lin, {Yu Ching} and Wu, {Tsung Tsong} and Sun, {Jia Hong} and Masayoshi Esashi",

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AU - Chen, Yung Yu

AU - Huang, Li Chung

AU - Wang, Wei Shan

AU - Lin, Yu Ching

AU - Wu, Tsung Tsong

AU - Sun, Jia Hong

AU - Esashi, Masayoshi

PY - 2013/4/15

Y1 - 2013/4/15

N2 - Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

AB - Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

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SN - 0003-6951

VL - 102

JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

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