@conference{3825d1df4e0a4f2299127c44adce053b,
title = "Amine Group Formation and Bio-applications on ALD HfO2 with Nitridation by NH3 Plasma",
author = "I-Shun Wang and Wen-Yu Chuang and Tseng-Fu Lu and Cheng-En Lue and Polung Yang and Pijanswska, \{Dorota G.\} and Yi-Ting Lin and Chia-Ming Yang and Jer-Chyi Wang and Jau-Song Yu and Yu-Sun Chang and Chao-Sung Lai",
year = "2011",
language = "American English",
note = "2011 4th IEEE International NanoElectronics Conference (IEEE INEC 2011) ; Conference date: 21-06-2011 Through 24-06-2011",
}