An automatic on-line thin-film thickness monitoring technique

Che Hua Yang*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this research, a non-contact optical technique known as laser ultrasound technique (LUT) technique is introduced for on-line or off-line thin film thickness measuring purpose. The LUT uses a pulsed laser to generate acoustic waves to travel along plate-like sample, and the acoustic waves are detected with a laser interferometer. Information of the thin film coated on the plate-like samples are extracted by analyzing the detected acoustic wave signals. This technique has advantages including (1) non-contact and non-destructive laser optical technique, (2) good sensitivity capable of measuring thin film thickness of 20 angstrom, or 2 nano-meters, (3) capable of performing in situ, on-line monitoring task, and (4) embedded hardware and software for automatic on-line monitoring. The current technology is ready for applications in flat panel display industries.

Original languageEnglish
Title of host publication2007 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2007
Pages3001-3005
Number of pages5
DOIs
StatePublished - 2007
Externally publishedYes
Event2007 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2007 - Montreal, QC, Canada
Duration: 07 10 200710 10 2007

Publication series

NameConference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
ISSN (Print)1062-922X

Conference

Conference2007 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2007
Country/TerritoryCanada
CityMontreal, QC
Period07/10/0710/10/07

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