Abstract
A novel differential-phase optical coherence reflectometer (DPOCR) was proposed using a low-coherence source, integrating it with an analog differential-phase decoding method. In the experiment, the DP-OCR performed a localized surface profile measurement of an optical grating (1200 1p/mm) and demonstrated its ability to measure the translation speed of a tilted mirror. Experimentally, the resolution of the axial displacement of proposed DP-OCR at 185 pm was demonstrated.
| Original language | English |
|---|---|
| Pages (from-to) | 12847-12858 |
| Number of pages | 12 |
| Journal | Optics Express |
| Volume | 16 |
| Issue number | 17 |
| DOIs | |
| State | Published - 18 08 2008 |
| Externally published | Yes |