Analysis and Simulation of Excimer Laser Annealing for Recrystallization of Amorphous Silicon Films

劉明德

Research output: Types of ThesisMaster's thesis

Translated title of the contribution以準分子雷射退火進行再結晶之分析與模擬
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2004
Externally publishedYes

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