TY - JOUR
T1 - Anion sensing and interfering behaviors of electrolyte-insulator-semiconductor sensors with nitrogen plasma-treated samarium oxide
AU - Ye, Yu Ren
AU - Wang, Jer Chyi
AU - Chan, Ya Ting
N1 - Publisher Copyright:
© 2015 The Japan Society of Applied Physics.
PY - 2015/4/1
Y1 - 2015/4/1
N2 - In this article, we demonstrate a samarium oxide (Sm2O3) electrolyte-insulator-semiconductor (EIS) sensor with nitrogen plasma immersion ion implantation (PIII) treatment for anion sensing and interfering characterization. Chloride (Cl-), nitrite (NO2-), and nitrate (NO3-) ions were detected, and the sensitivity was about 49.75mV/pCl, 53.8mV/pNO2, and 56.19mV/pNO3, respectively. Ion sensitivity was enhanced with the increase in ionic radius of the target ion. Titration was performed to analyze the interference of anions. To assess interferences from these ions (Cl-, NO2-, and NO3- selectivity coefficients obtained by fixed interference method (FIM) measurements were presented. In result, the coefficients indicate that the interference can be ignored. Furthermore, characteristics of drift demonstrates that the sample exhibits long-term stability for significantly lower drift of chloride, nitrite, and nitrate ions, respectively. The Sm2O3 EIS sensor with nitrogen PIII treatment exhibits superior anion sensitivity, selectivity, and stability; therefore, this sensor is suitable for future biosensing applications.
AB - In this article, we demonstrate a samarium oxide (Sm2O3) electrolyte-insulator-semiconductor (EIS) sensor with nitrogen plasma immersion ion implantation (PIII) treatment for anion sensing and interfering characterization. Chloride (Cl-), nitrite (NO2-), and nitrate (NO3-) ions were detected, and the sensitivity was about 49.75mV/pCl, 53.8mV/pNO2, and 56.19mV/pNO3, respectively. Ion sensitivity was enhanced with the increase in ionic radius of the target ion. Titration was performed to analyze the interference of anions. To assess interferences from these ions (Cl-, NO2-, and NO3- selectivity coefficients obtained by fixed interference method (FIM) measurements were presented. In result, the coefficients indicate that the interference can be ignored. Furthermore, characteristics of drift demonstrates that the sample exhibits long-term stability for significantly lower drift of chloride, nitrite, and nitrate ions, respectively. The Sm2O3 EIS sensor with nitrogen PIII treatment exhibits superior anion sensitivity, selectivity, and stability; therefore, this sensor is suitable for future biosensing applications.
UR - https://www.scopus.com/pages/publications/84926301534
U2 - 10.7567/JJAP.54.04DL04
DO - 10.7567/JJAP.54.04DL04
M3 - 文章
AN - SCOPUS:84926301534
SN - 0021-4922
VL - 54
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 4
M1 - 04DL04
ER -