Annealing effects on the properties of indium tin oxide films coated on soda lime glasses with a barrier layer of TiO2-SiO2 composite films

Rung Ywan Tsai*, Fang Chung Ho, Mu Yi Hua

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

14 Scopus citations

Abstract

The structural, optical, and electrical properties of indium tin oxide (ITO) films coated on soda lime glasses with and without a barrier layer of TiO2-SiO2 composite films before and after annealing in air at 300 and 500°C for 1 h have been systematically investigated using a x-ray diffractometer (XRD), spectrophotometer, and four-point probe, respectively. A TiO2-SiO2 barrier layer and an ITO layer were sequentially deposited onto unheated glass substrates by reactive ion-assisted electron-beam evaporation (IAD) using an advanced plasma source. Correlations between these properties and annealing temperatures and barrier-layer compositions are discussed. The suppression effect of a barrier layer on the outdiffusion of Na atoms from the soda lime glass substrate through the barrier layer into the ITO layer is investigated with secondary-ion mass spectrometry (SIMS). With respect to the optical and electrical requirements of ITO electrodes used in liquid crystal display (LCD) panels, ITO-coated soda lime glasses with a barrier layer of TiO2-SiO2 composite films with TiO2<50 at. % are superior to those with a barrier layer of SiO2.

Original languageEnglish
Pages (from-to)2335-2340
Number of pages6
JournalOptical Engineering
Volume36
Issue number8
DOIs
StatePublished - 08 1997
Externally publishedYes

Keywords

  • Indium tin oxide (ITO)
  • Ion-assisted electron-beam evaporation
  • Liquid crystal display LCD
  • Soda lime glass
  • Structural, optical and electrical properties

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