Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

J. H. Hsieh; C. C. Tseng; Y. K. Chang; S. Y. Chang; W. Wu

doi:10.1016/j.surfcoat.2008.06.107

Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

J. H. Hsieh
, C. C. Tseng
, Y. K. Chang
, S. Y. Chang
, W. Wu^*

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

56 Scopus citations

Abstract

TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

Original language	English
Pages (from-to)	5586-5589
Number of pages	4
Journal	Surface and Coatings Technology
Volume	202
Issue number	22-23
DOIs	https://doi.org/10.1016/j.surfcoat.2008.06.107
State	Published - 30 08 2008
Externally published	Yes

Keywords

C-AFM
Cosputtering
Nanocomposite thin films
TaN-Ag

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10.1016/j.surfcoat.2008.06.107

Cite this

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title = "Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing",

abstract = "TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.",

keywords = "C-AFM, Cosputtering, Nanocomposite thin films, TaN-Ag",

author = "Hsieh, \{J. H.\} and Tseng, \{C. C.\} and Chang, \{Y. K.\} and Chang, \{S. Y.\} and W. Wu",

year = "2008",

month = aug,

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doi = "10.1016/j.surfcoat.2008.06.107",

language = "英语",

volume = "202",

pages = "5586--5589",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "22-23",

}

TY - JOUR

T1 - Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

AU - Hsieh, J. H.

AU - Tseng, C. C.

AU - Chang, Y. K.

AU - Chang, S. Y.

AU - Wu, W.

PY - 2008/8/30

Y1 - 2008/8/30

N2 - TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

AB - TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

KW - C-AFM

KW - Cosputtering

KW - Nanocomposite thin films

KW - TaN-Ag

UR - https://www.scopus.com/pages/publications/50349086294

U2 - 10.1016/j.surfcoat.2008.06.107

DO - 10.1016/j.surfcoat.2008.06.107

M3 - 文章

AN - SCOPUS:50349086294

SN - 0257-8972

VL - 202

SP - 5586

EP - 5589

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 22-23

ER -

Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

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Keywords

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