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Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation
Woei Cherng Wu, Chao Sung Lai*, Tzu Ming Wang, Jer Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen Cheng Lo, Tien Sheng Chao
*Corresponding author for this work
Research output: Contribution to journal › Journal Article › peer-review
28
Scopus
citations