CCD-based CMM geometrical error measurement using fourier phase shift algorithm

Chien Chou*, Ling Yu Chou, Chih Kuang Peng, Yeu Chuen Huang, Kuang Chao Fan

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

25 Scopus citations


A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally. In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration.

Original languageEnglish
Pages (from-to)579-590
Number of pages12
JournalInternational Journal of Machine Tools and Manufacture
Issue number5
StatePublished - 05 1997
Externally publishedYes


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