CCD-based CMM geometrical error measurement using fourier phase shift algorithm

Chien Chou; Ling Yu Chou; Chih Kuang Peng; Yeu Chuen Huang; Kuang Chao Fan

doi:10.1016/S0890-6955(96)00078-8

CCD-based CMM geometrical error measurement using fourier phase shift algorithm

Chien Chou^*
, Ling Yu Chou
, Chih Kuang Peng
, Yeu Chuen Huang
, Kuang Chao Fan

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

25 Scopus citations

Abstract

A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally. In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration.

Original language	English
Pages (from-to)	579-590
Number of pages	12
Journal	International Journal of Machine Tools and Manufacture
Volume	37
Issue number	5
DOIs	https://doi.org/10.1016/S0890-6955(96)00078-8
State	Published - 05 1997
Externally published	Yes

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title = "CCD-based CMM geometrical error measurement using fourier phase shift algorithm",

abstract = "A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally. In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration.",

author = "Chien Chou and Chou, \{Ling Yu\} and Peng, \{Chih Kuang\} and Huang, \{Yeu Chuen\} and Fan, \{Kuang Chao\}",

year = "1997",

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doi = "10.1016/S0890-6955(96)00078-8",

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AU - Chou, Chien

AU - Chou, Ling Yu

AU - Peng, Chih Kuang

AU - Huang, Yeu Chuen

AU - Fan, Kuang Chao

PY - 1997/5

Y1 - 1997/5

N2 - A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally. In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration.

AB - A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally. In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration.

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M3 - 文章

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EP - 590

JO - International Journal of Machine Tools and Manufacture

JF - International Journal of Machine Tools and Manufacture

IS - 5

ER -

CCD-based CMM geometrical error measurement using fourier phase shift algorithm

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